Silhan L, Arregi JAnder, Plichta T, Vaculik O, Novotny J, ?erý M. Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring. Journal of Vacuum Science & Technology B, 43, 034202 (2025).

Silhan L, Novotny J, Plichta T, Je?ek J, Vaculik O, ?erý M. Design of Setup for Laser Induced Plasma Etching, 2024 37th International Vacuum Nanoelectronics Conference (IVNC), 2024.