@article {3806,
	title = {Synthesis of thin-film materials using nonthermal plasma at a higher degree of dissociation},
	journal = {Plasma Processes and Polymers},
	volume = {20},
	year = {2023},
	pages = {2300019},
	doi = {https://doi.org/10.1002/ppap.202300019},
	url = {https://onlinelibrary.wiley.com/doi/abs/10.1002/ppap.202300019}
}
