Thin Layers

The group is concerned with r.f. magnetron sputtering of thin films for more than ten years. We have been preparing thin films (e.g. Al, Si ,Mo, Ti, Ni, Ag, C, ITO, Nb, W, TiN, Si3N4, SiO2 and their combination) intended for the use in projects of our Institute. In our laboratory we started production of multilayer systems consisting of a large number of double layers of nanometer thickness for use in the x-ray optics. The collaboration with coating centres in Czech Republic in the field of the study of sputtered layers of carbon and carbon nitride led to the preparation of nanostrucured multilayers and nanocomposite carbon based systems. Now we are the only laboratory in the Czech Republic offering dynamic impact wear tests for coating centres which produce hard coating.


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Thin Layers | Ústav přístrojové techniky

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