Laserové zdroje záření a metrologie optických soustav v DUV spektrální oblasti

The main goal of the project is to create custom laser source at 266 nm and 213 nm in collaboration with Institute of Scientific Instruments of the CAS and to adapt metrology background and methods mainly to the wavelengths 213 nm and 193 nm for further application in Meopta-optika, s.r.o. production.